The VIEW MicroLine® is a high-performance critical dimensional measurement system designed to measure wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
MicroLine systems feature the highest quality microscope optics, manually operated stages and programmable light intensity. MicroLine systems are robust and capable of measuring transparent layers, lines with irregular edge and other critical features.
Specifications
| Standard | Optional | |
| X,Y,Z Measuring Range (mm) | 200×200 | 300×300 |
| Z Focusing Range (mm) | 25 | |
| XY Stage | Cross roller with manual coaxial positioning and quick release | Glass stage insert for use with transmitted light |
| Imaging Optics | Olympus Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, tilt trinocular with eyepieces, and standard camera mounting tube | |
| Front Lens (Field Interchangable) | 10X Bright Field 50X Bright Field |
5X Bright Field or Bright Field/Dark Field 10X Bright Field or Bright Field/Dark Field 20X Long Working Distance, Bright Field or Bright Field/Dark Field 100X Long Working Distance, Bright Field or Bright Field/Dark Field 150X Long Working Distance, Bright Field or Bright Field/Dark Field |
| Illumination | Full spectrum, programmable tungsten halogen coaxial surface light | Full spectrum, programmable tungsten halogen transmitted light with adjustable N.A. stop |
